(Microtechnology and MEMS) 1st ed. 2020 Edition

by Gregory Barbillon (Editor), Alain Bosseboeuf (Editor), Kukjin Chun (Editor), Rosaria Ferrigno (Editor), Olivier Français (Editor)

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both academic and industrial domains, as these biodevices and systems are increasingly replacing traditional large size diagnostic tools. This book is unique in describing not only the devices and technologies but also the basic principles of their operation.

The comprehensive description of the fabrication, packaging and principles of micro/nano biosystems presented in this book offers guidance for researchers designing and implementing these biosystems across diverse fields including medical, pharmaceutical and biological sciences. The book provides a detailed overview of the fundamental mechanical, optical, electrical and magnetic principles involved, together with the technologies required for the design, fabrication and characterization of micro/nano fluidic systems and bio-devices.

Written by a collaborative team from France and Korea, the book is suitab